Time of Flight Elastic Recoil Detection Analysis (ToF-ERDA)
Matthew Sharpe & Callum McAleese

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Yifu Shi, et al. Appl. Phys. Lett. 2023; 123 (26): 261106.

DOI: https://doi.org/10.1063/5.0174131

Desorption electrospray ionisation (DESI) and particle induced X-ray emission (PIXE)

☐  The work investigates passivating‐contact stacks for solar cells; specifically thin film contact structures comprising e.g. poly-Si on SiOx.
☐  ToF-ERDA employed to directly detect and depth‐profile hydrogen (and deuterium) in these thin‐film stacks.
☐  The study shows that ToF-ERDA can resolve H/D. Artifact issues common to other techniques (e.g., SIMS) are mitigated by ToF-ERDA.
☐   Annealing treatments change the H/D distribution and that these changes correlate with passivation quality improvements. For example,            H/D removal or redistribution is linked to changes in the interface oxide and poly‐Si structure.