Time-of-Flight Elastic Recoil Detection Analysis (TOF-ERDA) is an ion-beam analytical technique used to determine the elemental composition and depth profiles of materials, particularly light elements like hydrogen. It works by directing a high-energy ion beam—often heavy ions such as iodine or chlorine—onto a sample surface, causing atoms to recoil out of the material. The recoiled atoms are detected, and their time of flight is measured to determine their mass and energy. This combination enables precise identification of elements and accurate depth-resolved quantification. TOF-ERDA offers excellent sensitivity to light elements, which many other analytical methods struggle to resolve. It provides near-surface to micrometer-scale depth profiling with high resolution. Because it measures energy and time independently, it reduces ambiguities in mass separation.
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