Rutherford Backscattering Spectrometry
Matthew Sharpe

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  1. R. J. Cox, et . Adv. Mater. 2024, 36, 2408437.
    DOI: https://doi.org/10.1002/adma.202408437
The Role of Hydrogen in ReRAM

☐  RBS is used to measure heavier elements in the sample, giving the thicknesses, compositions and interface demarcations of the device                 layers. RBS allows determination of major elemental changes and detection of any significant intermixing or diffusion of heavier species             due  to device operation or hydrogen impact.
☐  ToF-ERDA is crucial for detecting and quantifying light elements, especially hydrogen and other light atomic species (e.g., O, N) within the           device layers.

RBS channelling: A comparative study of epitaxial InGaAsBi/InP structures

☐  The work uses RBS channelling to investigate the crystallographic           quality, defect structure, and damage (or implantation-induced               changes) in a material (InGaAsBi/InP structures) following some            processing or irradiation.

☐  Through channelling measurements:
      ☐  Determine the fraction of atoms displaced from lattice sites
      ☐  Identify damage depth profiles
      ☐  Assess the recovery/annealing behaviour of the structure.
☐  This work links the degree of lattice disorder (using RBS                           channelling) to material performance (e.g., electrical, optical or               mechanical) or to how growth conditions affect structural integrity.